Interference Lithography for Patterned Media
نویسندگان
چکیده
منابع مشابه
Fabrication of 50 nm period gratings with multilevel interference lithography.
We have developed a multilevel interference lithography process to fabricate 50 nm period gratings using light with a 351.1 nm wavelength. In this process multiple grating levels patterned by interference lithography are overlaid and spatial-phase aligned to a common reference grating using interferometry. Each grating level is patterned with offset phase shifts and etched into a single layer t...
متن کاملParekh , Vishal , “ Process Development for Fabrication Of Bit - Patterned Medium For Magnetic Storage Devices ”
The dissertation describes lithographic structuring of large-area patterned medium samples with ~40nm features using ion beam proximity lithography (IBPL). The quality of the patterns formed in IBPL system is primarily limited by the quality of the stencil masks. Hence, the emphasis of this work has been to develop a reliable mask fabrication process that can achieve a size uniformity that is s...
متن کاملFabrication of metallic nanowires and nanoribbons using laser interference lithography and shadow lithography.
Ordered and free-standing metallic nanowires were fabricated by e-beam deposition on patterned polymer templates made by interference lithography. The dimensions of the nanowires can be controlled through adjustment of deposition conditions and polymer templates. Grain size, polarized optical transmission and electrical resistivity were measured with ordered and free-standing nanowires.
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متن کاملNanostructuring Magnetic Thin Films Using Interference Lithography
Proliferation of data caused by rapid increases in computer power and the rise of the internet have caused an acute need for advanced data storage technology. Patterned magnetic media and magneto-resistive random-access memory (MRAM) can potentially fulfill this need. The technique of interference lithography is examined in the context of patterning ~100 nm size features. An interferometer is d...
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